TEL Tokyo Electron 1181-000255-18 Controller Module

Product manual:

1、 Basic Information
Product model: 1181-000255-18

Product Name: Controller Module

Manufacturer: Tokyo Electron Ltd

Component Category: Main Control Module/Equipment Subsystem Control Board

Application environment: Used for process control system or subsystem control in Tokyo Electron semiconductor manufacturing equipment

2、 Functional positioning
Core control function

Manage and execute operational logic in equipment process flow, such as temperature regulation, gas flow rate, vacuum pump operation, valve opening and closing, etc.

Equipment status management

Real time monitoring of the operating status of each subsystem, processing of alarm information, and communication with the upper computer or main system.

Communication and Data Interaction

Support data transmission, command reception, and feedback response between the main control system or human-machine interface (HMI).

Signal Processing and Output

Receive analog/digital signals from sensors, perform calculations and decisions, and output control signals to the execution unit.

3、 Application Fields
Semiconductor process equipment (Etch, CVD, Ashing, etc.)

Control a specific subsystem, such as gas distribution unit (GDU), chamber temperature control system, RF power control or delivery system.

Process parameter automatic control module

Implement closed-loop control of key parameters such as flow rate, temperature, vacuum degree, etc.

Subsystem independent operation platform

Capable of self diagnosis and logical judgment, able to provide emergency protection in case of loss of main control.

4、 Technical characteristics (typical)
Multi channel I/O interface, supporting analog and digital input/output

Built in microprocessor or FPGA for local real-time control and logic processing

Support industrial communication protocols such as RS-485, CAN, TTL, GPIO

Modular plug-in design, easy to maintain and quickly replace equipment

High anti-interference ability, suitable for complex electromagnetic environment of semiconductor equipment

Usually integrated with EEPROM or Flash for storing programs and parameter configurations

Product details picture:

1181-000255-18

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