TEL Tokyo Electron 1181-000450-14 Control Unit Module

Product manual:

TEL Tokyo Electron 1181-000450-14 Control Unit Module
Category: Control Unit Module
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
This control unit module is the core electronic module in TEL semiconductor manufacturing equipment, mainly used for:

Control signals and feedback signals of integrated processing equipment subsystems

Responsible for logical control of process execution and status monitoring

Coordinate the sequence of actions and interlocking protection of each submodule in the equipment

Implement communication interface with the main control CPU board or upper computer system

2、 Typical application areas
gas control system

Control gas valve opening and closing, gas flow regulation

Monitor the status of gas pressure and flow sensors

Vacuum system management

Monitor the vacuum pump, valve switches, and pressure status

Realize safety interlocking and protection of vacuum system

Wafer handling system

Control the movement and position sensing of the robotic arm and platform

Ensure the safety and precision of handling actions

Heating and cooling system

Manage heater power and fan startup

Control temperature setting and abnormal protection

3、 Technical characteristics
Supports digital and analog signal input and output

Built in logic control circuit, realizing complex interlocking and sequential control

Standard industrial interface for modular installation and maintenance

Equipped with electrical isolation and anti-interference design to ensure signal stability

May contain microprocessors or dedicated control chips

Product details picture:

1181-000450-14

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