TEL Tokyo Electron 1181-000540-13 restriction board

Product manual:

TEL Tokyo Electron 1181-000540-13 limiter board
It is an electronic functional module used in TEL semiconductor manufacturing equipment, mainly responsible for safety functions such as signal limitation, protection, and level control.
This board is usually integrated into critical process systems to protect the main control system and sensitive components from abnormal voltage or signal interference.

1、 Basic Information
Product Name: Limiting Plate/Current Limiting Plate

Model: 1181-000540-13

Manufacturer: Tokyo Electron Ltd. (TEL)

Component type: Printed Circuit Board (PCB)

Function category: Signal restriction and protection module

2、 Main functions
Voltage/current limitation

Prevent input signals from exceeding the set threshold and protect the main control circuit or sensitive components;

Suppress sudden waves, surges, or external interference signals.

Signal level matching

Implement electrical isolation and level conversion between different subsystems;

Ensure the stability and compatibility of the overall signal transmission of the system.

Equipment operation protection

Automatically interrupt or limit signals when the device is in an abnormal state (such as short circuit, overload);

Avoid damaging the core control module or expensive components.

3、 Typical application areas
This restriction board is mainly used in the following types of TEL devices:

Dry etching equipment (Etcher)

Protect the RF control and cavity vacuum control signal paths.

CVD/ALD deposition equipment

Filter abnormal signals in gas valves and heating control circuits.

Wafer Transfer and Handling System

Limit the signal strength of the robotic arm and vacuum adsorption unit to prevent abnormal movements.

Power/Drive System Protection

Limit the voltage or current output of the drive board to actuators such as motors and air valves.

Product details picture:

More related products:

6ES7307-1KA02-0AA0powersupplymodule

531X307LTBAFG1 Ethernet module

DS200LPPAG1AAA Digital Input/Output Module

More product recommendations:

IS420PUAAH1A Ethernet Switch

KOLLMORGEN 6SM57M-3.000 servo

KOLLMORGEN 6SM37M-6000 servo motor