TEL Tokyo Electron 1181-000571-13 Control PCB Card

Product manual:

Product Name:
TEL Tokyo Electron 1181-000571-13 Control PCB Card
（Control PCB Card）

Product definition and functionality:
The control PCB card is one of the core electronic control components in TEL (Tokyo Electron) equipment,
As the local control core of a subsystem or device unit, it has the following functions:

Execute control logic for specific submodules (such as handling systems, vacuum control, heating units, etc.)

Process input signals from the main control system or sensors and output control commands

Implement functions such as equipment status monitoring, action command execution, alarm interlocking, etc

Usually integrated with multiple communication interfaces and I/O ports, supporting modular interconnection within devices

May include embedded controllers, driver chips, data buffering, and security protection circuits

Main application areas:
1. Control of wafer processing module
Control moving parts such as wafer transfer arm, alignment platform, lifting mechanism, etc

Receive action sequence instructions from the upper control system and implement local logic processing

2. Vacuum and gas processing systems
Used to manage components such as vacuum pumps, valves, and gas flow controllers (MFCs) inside the chamber

Closed loop control of environmental pressure, gas ratio, etc

3. Local device status monitoring and protection
Real time collection of temperature, current, voltage, position, door lock and other signal status

Trigger device safety protection actions, such as power outage, emergency stop, interlock response

4. Modular control system integration
Working as a Distributed Control Unit (DCU) in large-scale systems

Collaborate with the Main Controller through serial or bus communication to operate in synergy

Typical application devices:
Tokyo Electron Etcher (etching equipment)

CVD/PVD equipment

Wafer Handling Robot System (EFEM)

Automatic loading system (Load Port)

Vacuum Chamber Control Unit

Product details picture:

1181-000571-13

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