TEL Tokyo Electron 1187-093732-11 Controller Module

Brand:TEL Tokyo Electron
Model:1187-093732-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1187-093732-11 Controller Module

Product manual:

Product Name: 1187-093732-11 Controller Module
Manufacturer: Tokyo Electron Ltd
Product type: Controller Module

1、 Product Overview
1187-093732-11 is a dedicated controller module used in Tokyo Electron semiconductor equipment to achieve equipment automation control.
This module is responsible for the control logic processing, signal management, and actuator driving of a certain functional subsystem within the device,
It is a key component that ensures the stable and efficient operation of equipment.

2、 Main functions
Automatic control logic execution

Run the equipment process control program to schedule and execute action instructions.

Signal acquisition and processing

Receive multiple sensor input signals, process them, and provide feedback control commands.

Actuator driver

Control the execution components such as solenoid valves, stepper motors, heaters, etc. to achieve precise control.

communication interface

Support communication with the main controller and upper computer system for data exchange and status reporting.

Fault detection and protection

Equipped with anomaly detection and alarm output functions to improve equipment safety.

3、 Typical applications
This controller module is widely used in the following devices or subsystems of Tokyo Electron:

Etcher (etching machine)