TEL Tokyo Electron 1380-002161-12 Controller Module

Brand:TEL Tokyo Electron
Model:1380-002161-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1380-002161-12 Controller Module

Product manual:

Introduction to TEL Tokyo Electron 1380-002161-12 Controller Module
1、 Basic Information
Model: 1380-002161-12

Alias: INR-244-112D/CIRCULATOR

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Mainly used for fluid circulation control systems in semiconductor manufacturing equipment

2、 Functional Features
Fluid circulation control
This controller module is responsible for regulating the circulation of fluids (such as coolant or gas) in the equipment to ensure the stable operation of the process system.

Signal Processing and Control
Realize the reception and processing of relevant sensor data, and control the actions of fluid pumps, valves, and other actuators.

device compatibility
Compatible with various TEL semiconductor devices, such as Etcher, CVD, ALD, and other systems.

3、 Application Fields
Fluid circulation management of semiconductor manufacturing equipment

Equipment maintenance and replacement of spare parts

Improvement of production process stability

4、 Precautions for use
Installation compatibility: When replacing, please confirm that the module matches the device model to avoid malfunctions caused by incompatible interfaces or signals.

Installation specifications: Install according to the equipment manufacturer's instructions, ensuring correct wiring and secure fixation.

Operation monitoring: Functional testing should be conducted upon initial operation to ensure proper fluid circulation control.

Regular maintenance: It is recommended to regularly check the module status, clean the connection points, and ensure the long-term stable operation of the system.