TEL Tokyo Electron 1381-648642-15 Control Motherboard Card

Brand:TEL Tokyo Electron
Model:1381-648642-15
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1381-648642-15 Control Motherboard Card

Product manual:

Product Name: 1381-648642-15 Control Motherboard Card
Manufacturer: Tokyo Electron Ltd
Product type: Main Control Board Module

1、 Product Overview
1381-648642-15 is an important control motherboard card in Tokyo Electron semiconductor equipment,
Mainly responsible for the core control function of equipment, coordinating various subsystems of equipment operation, and achieving automation control and data processing.

2、 Main functions
Integrated microcontroller or processor, running device control programs

Manage input and output signals, complete sensor data acquisition and actuator control

Support communication with the upper control system to achieve process parameter configuration and status monitoring

Equipped with fault detection and alarm functions to improve equipment reliability

3、 Typical applications
Widely used in various semiconductor manufacturing equipment of Tokyo Electron, including but not limited to:

Etcher equipment

Thin film deposition equipment (CVD, PVD)

Coater/Developer

Wafer processing and transportation system

4、 Technical characteristics (refer to general characteristics)
Project Description
Control chip microcontroller, DSP or FPGA
Power requirement 5V/12V/24V DC (according to equipment specifications)
Interface type: digital/analog I/O, communication interface (such as RS-232, etc.)
Installation method: Rack slot or screw fixation
Environmental adaptability, anti-static and anti-interference design, suitable for clean room environment