TEL Tokyo Electron 1981-600512-13 partition monitoring board

Product manual:

TEL Tokyo Electron 1981-600512-13 partition monitoring board
It is a specialized electronic board used in Tokyo Electronics (TEL) semiconductor equipment to monitor and manage the status of various functional or process areas of the equipment,
Mainly responsible for collecting sensor data within the partition, monitoring equipment operation status, and providing real-time feedback to the main control system.

1、 Product Overview
Project Content
Product Name: Zone Monitoring Board
Product model 1981-600512-13
Manufacturer Tokyo Electron Ltd
Functional positioning area status monitoring and signal acquisition

2、 Core functions
Partition status collection

Responsible for collecting sensor signals such as temperature, pressure, flow rate, and switch quantity within the designated partition of the equipment;

Real time monitoring of the process and equipment operation status of the partition.

Signal Processing and Feedback

After processing the collected analog and digital signals, convert them into a standard format recognizable by the main control system;

Monitor abnormal states and issue alarm signals.

Communicate with the main control system

The partition information is transmitted to the central control module through the communication bus, supporting centralized monitoring and remote management.

3、 Application Fields
Independent monitoring and management of each process area in semiconductor production equipment;

Support zoning safety control and parameter adjustment in the process;

Partition fault location assistance during equipment maintenance and diagnosis.

Product details picture:

1981-600512-13

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