TEL Tokyo Electron 1981-604035-11 Control Motherboard Card

Product manual:

Product Name:
TEL Tokyo Electron 1981-604035-11 Control Motherboard Card
（Control Main Board / Control PCB Assembly）

Product Function Introduction:
This card is the main control board used for the core control system of Tokyo Electron semiconductor equipment,
Its function is similar to the "central processing unit" in industrial control systems, and its main functions include:

As the central control unit of the device, execute the main control logic

Manage the communication, data exchange, and action coordination of each submodule

Collect sensor signals, analyze and process them, and issue control commands

Control actuators (such as motors, valves, cylinders, heaters, etc.) for precise operation

Communicate with upper level systems (such as human-machine interface HMI, MES system) and synchronize status data

Main application areas:
1. Semiconductor manufacturing process control
Used in TEL CVD, Etcher, PVD and other equipment to manage key process parameters (temperature, pressure, time, gas flow rate, etc.)

Accurately control the processing steps to ensure product consistency and yield

2. Wafer handling and automation control system
Manage the position movement and process control of wafers in EFEM, Load Port, Transfer module, etc

Control complex action logic such as alignment, handling, loading, unloading, lifting, etc

3. Equipment safety interlocking and fault handling
Real time monitoring of equipment operation status, execution of emergency shutdown, fault alarm, error log recording and other protective functions

Support response handling for abnormal states such as ESD, overcurrent, overvoltage, etc

4. Communication and Interface Control
Equipped with industrial communication interfaces (such as RS-232/485, Ethernet, CAN) to interface with other control boards and factory networks

Command transmission and status feedback of management and human-machine interface (HMI) and upper software

Typical equipment used:
CVD (Chemical Vapor Deposition Equipment)

Etcher (etching equipment)

PVD (Physical Vapor Deposition Equipment)

Load Port/EFEM (Automated Front End Module)

Transfer Modules

Product details picture:

1981-604035-11

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