TEL Tokyo Electron 1B80-001310-11 Control Pulse Card

Product manual:

Product model: TEL Tokyo Electron 1B80-001310-11
Type: Control Pulse Board/Pulse Control Card
Functional positioning: A functional module used in semiconductor equipment to output precise control pulse signals, driving key actuators to operate at a set pace

1、 Product Function Overview:
The 1B80-001310-11 control pulse card is a precision control module developed by Tokyo Electron (TEL) for its automated process equipment,
Specially used for generating, modulating, and outputting control pulse signals with strong temporal characteristics.
It is commonly used for driving stepper motors, controlling solenoid valves, triggering RF power supplies, and other applications that affect pulse width
In subsystems with strict requirements for frequency and timing, ensure that the equipment performs high-precision execution within nanoseconds/milliseconds.

2、 Main application areas:
Precision stepper or servo control system

Output control pulse signals to drive components such as robotic arms, turntables, or actuators, achieving micrometer level precision positioning.

RF/plasma power trigger

Send synchronous pulse signals to modules such as RF power supply and plasma source to ensure coordinated execution between process steps.

Electromagnetic valves and process gas control

Control highly responsive solenoid valve switches, regulate gas flow or reaction chamber pressure, and achieve fast switch response.

Process sequence timing control

Provide timing control pulses in processes such as cleaning, etching, and deposition to coordinate the precise triggering of each action unit.

Equipment synchronization control and interface expansion

Communicate with the main control system and coordinate multiple module actions to achieve hardware cascade synchronization between modules.

Product details picture:

1B80-001310-11

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