TEL Tokyo Electron 1B80-002395-11 Area Board

Brand:TEL Tokyo Electron
Model:1B80-002395-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1B80-002395-11 Area Board

Product manual:

TEL Tokyo Electron 1B80-002395-11 Area Board
Type: Electronic Area Control Board/Area Board/Zone Interface Board
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview

The main functions include:

Manage control signals for specific areas (such as a cavity, heating unit, transmission path)

Integrated sensor input, actuator control, valve control, temperature or pressure feedback

Implement interface relay between the main control board, I/O board, and driver board

Provide localized power distribution and signal isolation to improve system stability and maintainability

2、 Typical application areas
1. Thin film deposition equipment such as CVD and ALD
Control heaters, MFCs (Mass Flow Controllers), vacuum valves, etc. inside specific chambers

Regional control of process parameters such as gas ratio, temperature distribution, pressure, etc

2. Plasma etching equipment (Etcher)
Provide high-frequency power interface, safety interlock, and sensor feedback channel for a certain area

Realize multi cavity collaborative work control

3. Wafer handling system (Loadlock/Transfer Arm area)
Control the lifting platform, vacuum pump, position sensor, door lock drive, etc

Realize precise signal transmission and logical judgment for inter regional linkage

4. Independent electrical control management of system submodules
Divide complex equipment into several "zones", with each zone board independently managing signals and controls within its own area

Support modular maintenance and replacement for quick diagnosis and repair

3、 Technical characteristics (refer to TEL conventional area board design)
Multi channel signal input/output, supporting digital and analog mixing

Optocoupler and electrical isolation design ensure signal stability and system safety

Compatible with multiple communication methods (such as TTL, RS-485, CAN, TEL internal bus)

Industrial grade PCB board, suitable for high temperature, vacuum, and high cleanliness environments

Equipped with status indicator lights and testing points, convenient for maintenance and fault location