TEL Tokyo Electron 1B80-002396-11 Valve Area Plate

Brand:TEL Tokyo Electron
Model:1B80-002396-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

TEL Tokyo Electron 1B80-002396-11 Valve Area Plate

Product manual:

Product model: TEL Tokyo Electron 1B80-002396-11
Type: Valve Area Board/Valve Manifold PCB
Functional positioning: Drive and signal interface module for controlling and managing gas valves or liquid valves

1、 Product Function Overview:
The 1B80-002396-11 valve area board is one of the specialized control boards used by Tokyo Electron (TEL) in its semiconductor process equipment.
This module is used to centrally control the opening and closing actions of multiple gas or liquid valves, as well as monitor their status signal feedback,
Mainly used in key units such as gas supply system (GAS BOX), chemical supply system (CUC), vacuum control system, etc.

2、 Main application areas:
Semiconductor equipment gas/liquid transport control system

Control CVD, Etcher, PVD and other equipment used for transporting chemical gases
(such as SiH ₄, NH ∝, O ₂, etc.) or solenoid valves and proportional valves for liquid chemicals,
Ensure that materials are supplied in the set order and flow rate in the process flow.

Valve group integrated control platform

As an integrated drive interface for multiple valves, it enables centralized control and unified power distribution,
Reduce wiring complexity and improve maintenance efficiency.

Automatic switching system for gas and liquid circuits

Applied to process path management such as gas channel switching, backup gas source conversion, and purge control,
Ensure the safe and reliable operation of the system.

Real time status monitoring and alarm feedback

Collect valve switch status and pressure sensor signals, and combine them with the main control system to identify abnormal situations
Alarm and shutdown protection shall be provided for valve jamming and pressure deviation.

Equipment interlocking and process linkage control

Linkage with process control programs, such as pressure regulation of process chambers, plasma opening, cleaning steps, etc,
Trigger necessary gas/liquid control actions through the valve area plate.