TEL Tokyo Electron 1B80-002397-11 Controller Module

Product manual:

Product model: 1B80-002397-11
Name: Controller Module
Manufacturer: Tokyo Electron Ltd. (TEL)
Component Category: System Control Unit/Embedded Control Module

1、 Product Overview:
The 1B80-002397-11 controller module is the core control component in TEL semiconductor equipment,
Mainly used to coordinate the operation of multiple subsystems within the equipment, process real-time data, and execute process control instructions.
It interacts with sensors, drive units, and upper level systems to achieve precise and automated equipment operation control.

This module is widely used in high-end process equipment such as Clean Track, Etch, Coach/Developer, or PVD/CVD series.

2、 Main functions:
Function Type Function Description
Process flow control management of semiconductor process steps (such as cleaning, drying, coating, etc.)
I/O signal processing receives and outputs multiple digital/analog signals
Real time monitoring of equipment operation status, temperature, pressure and other parameters through status monitoring
Communication interface management and upper computer HMI、 Human machine interface or other control board communication
Fault handling function, abnormal diagnosis and protection control, linkage alarm and shutdown function

3、 Technical parameters (inferred from TEL's similar module specifications):
Parameter Project Technical Description (Speculative)
Power supply voltage 24V DC standard industrial voltage
Communication interface RS-232/RS-485/Ethernet/TEL dedicated bus
Data processing integrated with embedded CPU and memory (Flash+RAM)
Multi channel I/O interface ports, which may include DI/DO/AI/AO
Installation form: plug-in or modular, installed in the equipment main control rack
EMC compatibility industrial grade anti-interference design (compliant with semiconductor equipment EMC standards)

4、 Application scenarios:
TEL Clean Track series: used to control units such as gluing, developing, cleaning, etc

TEL Unity, Tactras, Trias series: used for vacuum process platforms such as etching and deposition

Front end carrier/wafer handling system: controls wafer transfer, alignment, and identification

Process data acquisition and feedback regulation: the core computing component in closed-loop control systems

Product details picture:

1B80-002397-11

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