TEL Tokyo Electron 1B80-002785-11 processor module

Product manual:

Basic Product Information
Model: 1B80-002785-11

Name: Processor Module

Manufacturer: Tokyo Electron (TEL)

Version: 11th Revision

FUNCTIONAL OVERVIEW
Implement equipment control logic and process flow management

Processing signals from sensors and actuators to achieve real-time feedback control

Communication between management and upper control system and other modules

Coordinate the operation of various control units within the equipment to ensure the smooth completion of the process

Typical applications
Pre - and post-processing systems for lithography machines (Coater/Developer)

CVD/PVD thin film deposition equipment

Etching Equipment

Wafer handling and vacuum transfer module

FEATURES
Industrial grade embedded processor with high stability and real-time response capability

Support TEL dedicated communication protocol and industrial bus interface

Version number "-11" represents a specific revised version of hardware and firmware

Support multiple sensor input and actuator output interfaces

Usage suggestions
Power off and install with anti-static protection in place

Confirm that the firmware version matches the device to avoid compatibility issues

Recommend using original or authorized accessories to ensure stable operation of the equipment

It is recommended to have professional engineers perform configuration and debugging

Product details picture:

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