TEL Tokyo Electron 1B80-002815-11 Acquisition Card

Product manual:

TEL Tokyo Electron 1B80-002815-11 Data Acquisition Card (DAQ)
It is a high-precision signal acquisition module used in semiconductor manufacturing equipment,
Mainly responsible for collecting analog or digital signals from equipment sensors, monitoring units, and other parts,
And transmit it to the central control system for processing and control decision-making.
It is widely used in the etching process of Tokyo Electron CVD、 In key process equipment such as cleaning and conveying.

1、 Basic Information
Product model: 1B80-002815-11

Product Name: Data Acquisition Card

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Signal acquisition and conversion module (analog/digital input)

2、 Core functions
Sensor signal acquisition

Supports multi-channel analog input (AI) and digital input (DI), with a certain resolution and sampling frequency.

Analog to Digital Conversion (ADC)

Perform A/D conversion on analog signals to enable them to be read and judged by central control systems (such as E244 controllers);

Supports high-precision 12 bit or 16 bit ADCs (according to TEL module design standards).

Status feedback and alarm linkage

Participate in the system's fault self diagnosis and closed-loop control logic.

3、 Typical application areas
This acquisition card is widely used in the following devices of Tokyo Electron:

Etcher equipment

Collect parameters such as air pressure, RF voltage, current feedback, and temperature control device output inside the chamber;

Provide real-time input for plasma stability and precision control.

CVD/ALD equipment

Monitor temperature distribution, gas flow rate, and chamber environmental parameters;

Provide accurate data to support sedimentation rate regulation and film formation control.

Cleaning system (Wet Bench/Clean Track)

Collect signals such as liquid level, flow rate, chemical concentration, and hot plate temperature;

Realize closed-loop control and safety protection of the cleaning process.

Wafer Handling and Transport System (EFEM/Load Port)

Detect the status signals of position sensors, access control sensors, and alignment systems;

Support safety interlocking and action feedback processing.

Product details picture:

1B80-002815-11

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