TEL Tokyo Electron 1B80-002816-11 Digital Control Board

Product manual:

TEL Tokyo Electron 1B80-002816-11 Digital I/O Control Board
It is a high reliability digital signal control module used in Tokyo Electron semiconductor equipment,
Mainly responsible for digital input acquisition and digital output control functions between various subsystems of the equipment.
It is widely used in TEL's etching (Etch), deposition (CVD), cleaning (Wet Bench), front-end module (EFEM) and other equipment,
It is one of the core components for implementing process action logic execution, status detection, and safety interlocking.

1、 Basic Information
Product model: 1B80-002816-11

Product Name: Digital I/O Control Board

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: switch input/output control card

Installation method: Plug in module, installed in the control host rack or distributed control box

2、 Core functions
Digital Input Acquisition (DI)

Collect equipment status signals, such as limit switches, door lock status, air pressure sensors, alarm contacts, etc;

Support multi-channel parallel acquisition and adapt to high-speed device action feedback requirements.

Digital Output Control (DO)

Control solenoid valves, relays, motor start stop, alarm lights, access control systems and other execution components;

Fast output response speed, suitable for real-time control scenarios.

Safety interlock execution

Implement logic controls such as "door interlock", "vacuum protection", and "temperature alarm" to ensure process safety;

Support interlock triggered interrupt control mechanism.

Isolation and protection design

All input/output channels are equipped with optocoupler isolation to prevent signal interference;

Built in overvoltage, overcurrent, and short-circuit protection, supporting hot swapping.

Product details picture:

1B80-002816-11

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