TEL Tokyo Electron 1B80-002822-11 Control Board
Brand:TEL Tokyo Electron
Model:1B80-002822-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!
Details
TEL Tokyo Electron 1B80-002822-11 Control Board
Product manual:
Product model: TEL Tokyo Electron 1B80-002822-11
Manufacturer: Tokyo Electron Ltd. (TEL)
1、 Function Overview
This control board is used in TEL semiconductor manufacturing equipment and mainly undertakes the following functions:
Manage the operation of local device units (such as valves, heaters, pumps, etc.)
Receive instructions from the main control system and output control signals
Collect sensor data and provide feedback to the main control system
Implement interlocking protection and process logic control
May include analog and digital signal interfaces
2、 Typical application areas
Etcher system
Control key process units such as vacuum valves, RF power supplies, and gas flow rates.
Thin film deposition system (CVD/ALD)
Manage temperature control, gas mixing, and valve drive logic.
Wafer Transfer System (Loadlock, Transfer Arm)
Control the actions of the robotic arm, position sensor, and access control system.
Cleaning system or drying module
Control liquid delivery, solenoid valves, and temperature control units.
3、 Technical characteristics (common)
Multi channel input/output interface (digital/analog)
Communication interface: TTL, RS485 or dedicated bus
May contain MCU or logic control chip
Signal isolation and filtering function
Used in conjunction with TEL control motherboard, relay board, etc
Product details picture:
More related products:
6ES7313-5BE03-0AB0AnalogOutputModule
CI860K01 3BSE032444R1 power module
More product recommendations:
ASEA DSQC100 connector backplane
