TEL Tokyo Electron 1D08-000130-11 Processor Module

Product manual:

product name
TEL Tokyo Electron 1D08-000130-11 Processor Module
Category: Processor Module
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
This processor module is one of the core control units in TEL semiconductor equipment, and its main functions include:

Execute the main control logic and computational tasks of the device

Process input sensor data and control commands

Communication and coordination with other modules such as I/O boards, driver boards, relay boards, etc

Support automated process control and status monitoring of equipment

Manage system parameters and configurations of devices

2、 Typical application areas
Main control of semiconductor manufacturing equipment

Run the process control program, coordinate equipment actions and process parameters

Realize communication between equipment and upper level systems (MES, factory automation system)

Wafer processing system

Manage the operation of subsystems such as wafer handling, chamber control, and gas supply

Real time processing of process status and alarm information

Equipment safety and interlocking

Perform safety logic judgment to ensure the safe operation of equipment

Monitor key parameters and trigger protective measures

3、 Technical characteristics
Integrate high-performance microprocessors or microcontrollers

Support multiple communication interfaces (such as Ethernet, serial port, fieldbus, etc.)

Built in memory for program and data storage

Strong anti-interference design, suitable for industrial environments

Function expansion can be achieved through firmware upgrade

Product details picture:

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