TEL Tokyo Electron 1D80-003300-11 Valve Angle Valve

Brand:TEL Tokyo Electron
Model:1D80-003300-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1D80-003300-11 Valve Angle Valve

Product manual:

TEL Tokyo Electron 1D80-003300-11 Valve Angle Valve
It is a key component used for precise gas control in semiconductor equipment.
This component plays a role in "on/off" and flow regulation in vacuum or gas processing systems,
Mainly used for the distribution, isolation, and regulation of process gases.

1、 Product Name
Component model: 1D80-003300-11
Product Description: Valve Angle Valve (possibly a high-purity gas valve with drive)
Applicable equipment: Tokyo Electron (TEL) semiconductor process equipment, such as CVD, Etcher, ALD and other systems

2、 Function and Function
Gas circulation control
Control the on/off state of specific process gases (such as SiH ₄, NH3, O ₂, etc.) in the semiconductor process chamber.

Vacuum isolation function
Used as an isolation valve between vacuum chambers and gas sources, it has excellent sealing performance.

Structural design of angle valve
The flow channel has a 90 degree structure, which is suitable for compact space layout inside the equipment and reduces the risk of particle accumulation.

Automated driver support
Most of them are driven by pneumatic or electric means, and can be remotely opened and closed by system control signals.

3、 Typical application areas
CVD (Chemical Vapor Deposition) system
Control the precursor gas entering the reaction chamber to ensure deposition thickness and uniformity.

plasma etching system
Control the entry or emission of reactive gases to support the stability of the reaction process.

ALD (Atomic Layer Deposition) equipment
Realize precise time controlled gas switching to meet the precision requirements of layer by layer stacking.

Cleaning and exhaust system
Used to turn on/off inert gas paths such as N ₂ and Ar, assisting in equipment cleaning and gas path replacement.