TEL Tokyo Electron 1D81-000096-13 Sensor Module

Product manual:

1、 Basic Information
Product Model: 1D81-000096-13

Product Name: Sensor Module

Manufacturer: TEL (Tokyo Electron Limited, Tokyo Electronics, Japan)

Product type: Signal acquisition/environmental monitoring module

Version number: -13 (indicating the 13th revision or specific configuration)

2、 Main functions
This sensor module is generally used in TEL semiconductor manufacturing equipment to undertake key monitoring and data acquisition tasks. Its main functions are as follows:

Functional category description
Real time monitoring of temperature, pressure, position, flow rate, gas concentration, or other process parameters through signal acquisition.
Data transmission converts the collected signals into digital/analog data and transmits them to the main control system.
The device status feedback detects the target status (such as chamber vacuum, liquid level, valve opening and closing, etc.) and feeds it back to the main control logic.
Process monitoring is used for stable control of process parameters, ensuring process repeatability and consistency.

3、 Typical application areas
This module is commonly used in the following TEL systems for monitoring critical process status:

CVD/ALD thin film deposition equipment

Monitor the temperature, pressure, gas flow rate, etc. of the sedimentation chamber.

Etch etching equipment (such as Tactras series)

Monitor parameters such as plasma chamber pressure, RF power reflection, and cooling water temperature.

Photolithography pre-processing equipment (such as ACT series)

Detect heating/cooling plate temperature, development pressure, spray volume, gas leakage, etc.

Vacuum/handling module

Detect the status of the chamber switch, clamping pressure, transmission arm position feedback, etc.

Product details picture:

1D81-000096-13

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