TEL Tokyo Electron 1D81-000104 Interface PCB Board

Product manual:

TEL Tokyo Electron 1D81-000104 Interface PCB Board
Type: Interface Printed Circuit Board
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
This board belongs to the standardized electronic interface module in TEL semiconductor equipment,
Used for accessing and forwarding internal control signals, power signals, and analog/digital signals of devices,
It is one of the relay nodes in the system that executes control logic. The main functions include:

Provide electrical interfaces between various modules within the device, such as sensors, drivers, actuators, etc

Support multi-channel signal transmission: such as I/O digital signals, analog signals, power signals, etc

Realize signal conditioning, conversion, and isolation between different device modules

Support logical judgment, filtering, voltage stabilization and other processing of signals

2、 Typical application areas
1. Etch/CVD/ALD and other main process chamber control systems
Receive instructions from the main control board (such as CPU board or process controller)

Transmit control signals to devices such as heaters, valves, and gas flow controllers (MFCs)

Return sensor data such as temperature, air pressure, and position inside the process chamber

2. Wafer Transfer System (Loadlock/Transfer Module)

Assist in completing wafer loading, transportation, alignment and other operational processes

3. Power and grounding distribution system
Provide power input channels with protection, filtering, and overload protection

Send stable power to multiple sub modules (driver board, control board, signal board, etc.)

4. Equipment Interlocking and Security System
Connect signals such as limit switches, safety door sensors, emergency stop switches, etc

Product details picture:

1D81-000104

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