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TEL Tokyo Electron 1D81-000118 Electronic Control Unit

Brand:TEL Tokyo Electron
Model:1D81-000118
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1D81-000118 Electronic Control Unit

Product manual:

TEL Tokyo Electron 1D81-000118 Electronic Control Unit
Electronic Control Unit (ECU) is a highly integrated control module,
Widely used in TEL semiconductor manufacturing equipment for precise logic control, status monitoring, and action coordination of key subsystems.

1、 Basic Information
Product Name: Electronic Control Unit

Product Model: 1D81-000118

Manufacturer: Tokyo Electron Limited (TEL)

Function category: Embedded Control Module/Distributed Control Unit (DCU)

2、 Main functions
As one of the system brains, this control unit has the following main functions:

Function Category Function Description
Logic control controls the working logic of executing components such as solenoid valves, motors, pumps, sensors, etc.
Signal acquisition and feedback receive sensor data such as temperature, pressure, and gas flow rate, and provide real-time feedback to the main system.
The communication bridge communicates with the main controller through CAN, RS485, EtherCAT, or dedicated TEL protocols.
State diagnosis provides fault detection, equipment operation status monitoring, and alarm signal output.

3、 Application Fields
1. Core equipment for semiconductor manufacturing
This control unit is mainly used in the following system modules:

Plasma etching equipment (Etchers)

CVD/ALD film formation system

Photolithography and development equipment

Wafer cleaning and drying equipment

Vacuum system (pump/valve control)

2. Subsystem module control
Temperature control system for cavity heater

Mass Flow Controller (MFC) gas flow control

Multi axis process arm or handling machinery

Pressure/temperature closed-loop regulation system

Product details picture:

1D81-000118

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