TEL Tokyo Electron 1D81-000128 Interface Relay Board

Product manual:

TEL Tokyo Electron 1D81-000128 Interface Relay Board
Interface Relay Board is a module designed specifically for semiconductor manufacturing equipment, used for signal isolation, input/output control, and electrical protection.
This module is a critical interface connecting the main controller and executing components in the TEL system,
Widely used in plasma etching CVD、 Cleaning and other equipment.

1、 Basic Product Information
Project Content
Product Name: Interface Relay Board
Product model 1D81-000128
Manufacturer Tokyo Electron Ltd. (TEL)
Type Electrical Signal Conversion and Isolation Module

2、 Main functions
The 1D81-000128 relay board typically assumes the following responsibilities in TEL equipment:

Functional category description
Signal isolation isolates the main controller from the high-voltage/strong current execution module, enhancing system safety and stability.
Signal conversion converts TTL/PLC control signals into relay contact signals to drive external devices.
Output drive controls loads such as solenoid valves, contactors, alarm devices, and executive motors.
Input feedback collection receives external action feedback signals (such as threshold switches, travel switches) and sends them back to the main controller.

3、 Typical application areas
This interface relay board is suitable for the following systems and modules in TEL semiconductor equipment:

1. Vacuum chamber control system
Control the action of vacuum pumps and valves;

Realize control and feedback of chamber pressure status.

2. Gas supply system (GAS BOX)
Control Mass Flow Controller (MFC);

Drive the gas supply valve and interlock it.

3. Wafer transfer system
Control the process arm, lifting mechanism, and fixture system;

Implement wafer position status input acquisition.

4. Heating and cooling system
Control the power switch of the heating unit;

Implement heating status feedback monitoring.

Product details picture:

1D81-000128

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