TEL Tokyo Electron 1D81-000129 Interface Panel

Product manual:

TEL Tokyo Electron 1D81-000129 Interface Panel
It is a standard electrical/signal interface module applied in semiconductor equipment,
Mainly used to integrate the main control system with various subsystems such as vacuum, gas, handling, temperature control, etc
Centralize the connection and management of signals, power sources, or communication lines between them.
It plays a role in bridging, isolating, distributing, and facilitating maintenance in device systems.

1、 Basic Product Information
Project Content
Product model 1D81-000129
Product Name Interface Panel
Manufacturer Tokyo Electron Ltd. (TEL)
Panel Function Positioning Electrical/Communication Interface Integration and Distributed Connection Platform
Install the front area of the control cabinet, main control system back panel, or I/O rack

2、 Main functions and functions
Functional category description
Centralized signal connection integrates scattered signal cables, communication lines, or power lines into a unified control system.
Physical interface standardization provides standardized interfaces (such as D-sub, MIL, terminal block) for easy cable management and quick replacement.
Signal protection between electrical isolation/protection and control systems is achieved through optocouplers or lightning arresters (optional function).
Easy to maintain clear interface identification and modular layout, facilitating troubleshooting and system upgrades.

3、 Typical application areas
This module is suitable for signal aggregation and management of sub modules within the following TEL systems:

1. Gas delivery system (GAS BOX)
Interface MFC, valve drive board, flow monitor;

Manage the input and output of gas path signals.

2. Vacuum system control
Vacuum pump start stop, vacuum gauge signal input;

Summary of interlocking control signals and alarm signals.

3. Chamber temperature control system
Heater switch, power signal, thermocouple/RTD sensor signal input connection.

4. Wafer handling/robotic arm system
Position sensors for process arms and lifting platforms;

Safety door interlock and action completion feedback.

Product details picture:

1D81-000129

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