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TEL Tokyo Electron 1D81-000140 Interface Board

Brand:TEL Tokyo Electron
Model:1D81-000140
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 1D81-000140 Interface Board

Product manual:

TEL Tokyo Electron 1D81-000140 Interface Board
It is a key signal interface module used inside semiconductor devices,
Mainly used for signal interaction, isolation, and switching between control systems and execution/detection units.
This interface board is an indispensable part of the TEL device control system,
Featuring high reliability, multi-channel support, and excellent anti-interference performance.

1、 Product basic information
Project Content
Product Name: Interface Board
Product model 1D81-000140
Manufacturer Tokyo Electron Ltd. (TEL)
The board series belongs to the 1D81 series (used for signal input/output and function expansion)
Installed in the control cabinet, IO interface box, or functional module backplane for use

2、 Main functional purpose
Function Category Function Description
Signal relay and adaptation convert the controller output signal into a voltage/current signal recognizable by the device, or vice versa.
The input-output interface integration provides multiple DI (digital input), DO (digital output), AI (analog input), or AO (analog output) interfaces.
Signal isolation and protection provide optocoupler or relay isolation to protect the main control system from overvoltage/overcurrent effects.
Equipment interlocking and status acquisition collect system status such as chambers, valves, temperature, current, etc., as the basis for judging system operating conditions.

3、 Typical application system
1. Signal acquisition and interlocking control in TEL wafer processing equipment:
Example: TEL Trias ™ ALD、Unity ™ CVD、Telius ™ Etch、Clean Track ™ series

2. Used for signal bridging in the following functional modules:
System module application instructions
Gas supply unit (GAS UNIT) receives/controls signals from MFC, valves, and pressure sensors
The temperature control system of the cavity monitors temperature signals and controls the switches of the heater and cooler
Vacuum system control receives vacuum gauge signals, controls vacuum pumps and vacuum valves
Automated handling systems exchange signals with sensors, process arms, and other components

Product details picture:

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