TEL Tokyo Electron 1D86-025584-12 Automation Control Module
Brand:TEL Tokyo Electron
Model:1D86-025584-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 1D86-025584-12 Automation Control Module
Product manual:
TEL Tokyo Electron 1D86-025584-12 Automation Control Module is a control core unit specifically designed for TEL semiconductor equipment,
Responsible for automatically executing equipment process logic, motion control, status monitoring, and safety interlocking functions,
It is one of the key modules to ensure the precise, efficient, and safe operation of the manufacturing process.
1、 Basic Information
Product Name: Automation Control Module
Product Model: 1D86-025584-12
Manufacturer: Tokyo Electron Ltd. (TEL)
Installation location: inside the control cabinet or control motherboard frame, usually near the main control processor and I/O interface area
Applicable systems: May be used for TEL coating and development systems (Track), etching equipment (Etcher), CVD systems, or transfer modules
2、 Main functions
Automatic process logic control
A series of action sequences during the operation of control equipment, such as heating, vacuuming, air intake, and handling.
The preset process steps can be implemented in the program for closed-loop control.
Motion control and actuator management
Drive robotic arms, motors, cylinders, and other execution units to precisely control position and rhythm.
Support DC motor/stepper motor control pulse signal output.
Equipment status monitoring and feedback
Receive sensor inputs (position, pressure, temperature, door status, etc.) to determine the current operating status of the equipment.
Provide fault alarm and interlock protection functions.
Communication and System Integration
Communicate with the upper computer and main control board to issue process parameters and upload status.
Supports multiple industrial communication protocols, such as CAN, Modbus, RS-232/485, TEL specific protocols, etc.
Product details picture:
1D86-025584-12
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