TEL Tokyo Electron 2109-321472-11 power module

Product manual:

The TEL Tokyo Electron 2109-321472-11 Power Supply Module is a regulated power supply device designed specifically for TEL semiconductor equipment, responsible for providing stable, isolated, and safe power support for various electronic control systems, sensor modules, and actuators in the equipment. It is one of the fundamental components that maintain the normal operation of the entire system.

1、 Basic Information
Product Name: Power Supply Unit

Product model: 2109-321472-11

Manufacturer: Tokyo Electron Ltd. (TEL)

Function type: Stabilized voltage power module/DC power converter

Installation location: in the equipment control cabinet, power distribution rack, and subsystem power supply unit

2、 Main functions
Voltage Conversion and Stable Voltage Output

Convert external input voltage (such as AC 100-240V or DC 24V) into the stable output voltage required by the device (such as+5V,+12V,+24V DC).

Adapt to the power requirements of multiple control modules, boards, and sensors.

Isolation protection function

Provide electrical isolation between input/output to avoid interference propagation and fault propagation.

Equipped with automatic protection mechanisms such as short circuit, overvoltage, overcurrent, and overheating.

Modular power management

Remote/local power on control can be achieved through system control software or hardware switches.

Support partitioned power supply for devices, facilitating maintenance and fault isolation.

3、 Typical application areas
Equipment type, power supply purpose
Etcher (dry etching equipment) provides DC power for vacuum control modules, valve drivers, gas module control boards, etc
CVD/ALD deposition equipment provides heating control board, solenoid valve, and sensor power supply
The photoresist coating equipment (Track) supplies power to the motor control board, developing unit, and heating unit
Transfer System drives robots, gripper sensors, I/O control systems, and provides power support

Product details picture:

2109-321472-11

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