TEL Tokyo Electron 2181-020219-11 PCB Components

Brand:TEL Tokyo Electron
Model:2181-020129-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 2181-020219-11 PCB Components

Product manual:

Introduction to TEL Tokyo Electron 2181-020219-11 PCB Components
1、 Basic Information
Model: 2181-020219-11

Name: Gas Interface Board

Manufacturer: Tokyo Electron Ltd. (TEL)

Application field: mainly used for gas control systems in semiconductor manufacturing equipment

2、 Function and Function
Gas flow path control
Implement switch control and flow regulation in the gas supply system, and manage the gas inlet and outlet paths.

Signal Processing
Receive feedback signals from gas sensors and actuators, and process control instructions.

Electronic interface module
As an electrical signal conversion and transmission bridge between the gas system and the main control system.

Modular design
Easy to replace during equipment maintenance, supports quick repairs and system upgrades.

3、 Typical application scenarios
Gas supply and regulation system for semiconductor process equipment

Gas flow monitoring and safety interlock system

Key gas control components of Etcher, CVD, ALD and other equipment

Equipment maintenance and replacement of spare parts

4、 Precautions for use
Confirm device compatibility, including interface form, voltage level, and signal type.

It is recommended to conduct functional testing when using second-hand parts to ensure normal operation.

Understanding the gas system configuration of the equipment can help accurately match and install the module.