TEL Tokyo Electron 2184-020214-12 Digital Control Board

Product manual:

TEL Tokyo Electron 2184-020214-12 Digital Control Board
（Digital I/O Control Board）

Product Function Introduction:
This digital control board is the core I/O control module in Tokyo Electron (TEL) semiconductor equipment,
Used for managing the input and output of various digital signals in devices,
And coordinate the logical control of sensors, actuators, switches, and other devices. The main functions include:

Receive digital input signals from external devices such as buttons, switches, sensors, etc

Output control signals to solenoid valves, relays, buzzers, indicator lights, etc

Supports multiple digital channels with high-speed and stable data processing capabilities

Communicate with the main control system or PLC to achieve automatic control logic in the process flow

Equipped with input filtering, output short-circuit protection, status monitoring and other functions to enhance system safety

Main application areas:
1. Process control and action execution
Typical digital control tasks such as controlling the opening and closing of chamber doors, lifting and lowering of loading trays, switching of air valves, and alarm output

Receive device status signals such as sensor triggers, in place signals, process preparation completion, and other inputs

2. Equipment interlocking and safety control
Implement safety interlock logic at the device level, such as prohibiting actions when the vacuum is not reached, inability to start when the door is not closed, etc

Manage critical operating conditions such as emergency stop, power protection, operation/stop, etc

3. I/O status monitoring and debugging support
Provide signal indicator lights and online monitoring interfaces for easy fault diagnosis and maintenance

Facilitating the process debugging of equipment and the joint debugging of control systems

Product details picture:

2184-020214-12

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