TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module
Brand:TEL Tokyo Electron
Model:2184-020028-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module
Product manual:
TEL Tokyo Electron 2184-020228-12 Analog Input Electronic Module
It is a functional electronic module used by Tokyo Electronics Company in semiconductor manufacturing equipment,
Specially used to collect analog signals (Analog Input) from internal sensors or process control systems of devices,
1、 Basic Product Information
Project Content
Product Name Analog Input Electronic Module
Model 2184-020228-12
Tokyo Electron Semiconductor Equipment System
Function type: Analog signal acquisition and input interface
2、 Main functions
Analog signal acquisition
Receive from temperature sensors, pressure sensors, gas flow meters
Continuous analog electrical signals from devices such as position feedback sensors (such as 0-5V, 0-10V, 4-20mA, etc.);
The module has an A/D conversion function inside, which digitizes analog signals,
For further processing by the control system.
Signal isolation and stable input
Capable of electrical isolation, effectively avoiding external signal interference affecting the main control system;
Improve the overall noise resistance and operational stability of the system.
Data upload and process control support
Upload the collected parameters in real-time to the main control unit for closed-loop control logic;
It can be used for dynamic process adjustment of linked actuators, such as temperature control feedback, flow regulation, etc.
3、 Application Fields
Semiconductor front-end process equipment
Applied to TEL wafer manufacturing equipment such as coating and developing equipment (Clean Track), etching machines (Etcher), cleaning equipment, etc;
Collect key process variables for real-time monitoring and control.
Environmental parameter collection system
Installed in equipment parts such as vacuum chambers, heating platforms, gas supply units, etc;
Real time collection of analog information such as temperature, pressure, and gas flow rate.
Equipment maintenance and diagnosis
Engineers can obtain detailed process parameters through this module for equipment diagnosis and debugging;
When the module is damaged or aged, it can be replaced to restore the signal link function.
Product details picture:

2184-020028-12
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