TEL Tokyo Electron 2981-600566-1 Printed Circuit Board

Product manual:

TEL Tokyo Electron 2981-600566-1 Printed Circuit Board (PCB)
It is a key electronic component in Tokyo Electron semiconductor manufacturing equipment,
Usually used in equipment control systems to undertake functions such as signal transmission, interface connection, or power management.

The following are the product application areas and functional descriptions of the PCB board (without patterns):

1、 Basic Information
Product model: 2981-600566-1

Product Name: Printed Circuit Board (PCB)

Manufacturer: Tokyo Electron Ltd. (TEL)

Component Category: Control/Signal Processing Printed Circuit Board

2、 Main functions
Signal interface and conversion

As an interface board for signal input and output in the control system, it realizes the conversion and transmission of multiple signals;

Connect sensors, actuators, and other electronic modules to achieve stable transmission of electrical signals.

Electrical connection and distribution

Provide internal power distribution and ground wire management to ensure the safe and stable operation of electronic components;

Equipped with filtering and anti-interference design to ensure signal integrity.

Auxiliary control logic

Possible integration of logic circuits and buffer chips for processing partial control logic or data buffering;

Support communication with the main control module (such as E244 series) to achieve device process control.

3、 Typical application areas
Etcher equipment

Used for gas flow control, RF power regulation, vacuum monitoring and other control circuits;

Chemical Vapor Deposition Equipment (CVD/ALD)

Support signal processing for temperature control system, reaction gas path, pressure monitoring, etc;

Photolithography pre-processing and post-processing equipment

Responsible for interface functions such as mechanical motion control and sensor data acquisition;

Conveyor System (EFEM/Load Port)

Manage input and output signals such as wafer handling and door lock status.

Product details picture:

2981-600566-1

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