TEL Tokyo Electron 2L12-000177-12 Control Unit

Brand:TEL Tokyo Electron
Model:2L12-000177-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 2L12-000177-12 Control Unit

Product manual:

Product Name: 2L12-000177-12 Control Unit
Manufacturer: Tokyo Electron Ltd
Product Type: Control Unit Module

1、 Product Overview
2L12-000177-12 is a control unit used for specific functional modules in Tokyo Electron semiconductor equipment,
Responsible for the automatic control of subsystems such as temperature control, handling, vacuum, valves, power supply, etc
Signal processing and data interaction are important components for devices to achieve precise process execution.

2、 Core functions
Subsystem Control Core

Manage and coordinate various functional components of the local subsystem, such as controlling motor start stop, valve switching, temperature regulation, etc.

Signal acquisition and processing

Support the acquisition, filtering, judgment, and response of analog and digital signals for real-time processing of control logic.

communication interface

Communicate with the main control system, transmit operating status, sensor data, and alarm information, possibly through RS-232, CAN, I/O bus, or TEL dedicated interface protocol.

Abnormal monitoring and protection

Real time monitoring of the operating status of control objects, supporting anomaly detection, over limit protection, and alarm feedback.

3、 Typical application scope
This control unit is suitable for controlling the following system modules in TEL equipment:

Wafer handling systems (such as EFEM, Loadport, Aligner)

Vacuum chamber control unit

Gas delivery system, valve array control

Temperature control system (heating module, hot plate, etc.)

Functional area units in CVD, PVD, Etcher, Developer and other equipment