TEL Tokyo Electron 2L39-000009-21 Controller Module

Product manual:

Product Name:
TEL Tokyo Electron 2L39-000009-21 Controller Module
（Controller Module）

Product Features:
This module is one of the key control units in Tokyo Electron semiconductor equipment,
Responsible for core logic control, action coordination, and data communication during equipment operation, mainly possessing the following functions:

Control the action logic and process sequence of multiple subsystems within the device

Collect sensor feedback signals and make logical judgments and responses

Send control commands to actuators (such as motors, valves, heating units, etc.)

Communicate with the upper computer or main control system to achieve data exchange and task allocation

Execute preset programs or automated processes to ensure efficient operation of equipment

Main application areas:
1. Core control of wafer processing system
Control the precision action process of wafer transfer, alignment, lifting, rotation, etc

Manage the motion logic of various parts such as robot arms and slide tables

2. Vacuum chamber operation control
Control the operation status of vacuum pump, gas valve, and chamber heating module

Realize closed-loop regulation of vacuum pressure and safety interlock protection

3. Process management and sequential logic control
Execute complex processing steps such as etching, deposition, cleaning, and other multi-stage process controls

Support setting process interruption, automatic reset, fault response and other functions

4. Device communication and human-machine interface integration
Communicate with touch screen, upper computer, MES system to upload/download data

Support advanced operations such as remote monitoring, logging, parameter configuration, etc

Product details picture:

2L39-000009-21

More related products:

MVME167-33BSingleBoardEmbeddedController

1TGB302004R5003RelayProtectionDevice

6ES7315-2AH14-0AB0IndustrialControlSystem

More product recommendations:

GESVDU-1D-8946 Input/Output Module

REF615E-E HBFEAEAGABCCANC11E Measurement

AMAT 0190-11415 Digital Input Module