TEL Tokyo Electron 2L39-000009-21 Controller Module
Brand:TEL Tokyo Electron
Model:2L39-000009-21
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 2L39-000009-21 Controller Module
Product manual:
Product Name:
TEL Tokyo Electron 2L39-000009-21 Controller Module
(Controller Module)
Product Features:
This module is one of the key control units in Tokyo Electron semiconductor equipment,
Responsible for core logic control, action coordination, and data communication during equipment operation, mainly possessing the following functions:
Control the action logic and process sequence of multiple subsystems within the device
Collect sensor feedback signals and make logical judgments and responses
Send control commands to actuators (such as motors, valves, heating units, etc.)
Communicate with the upper computer or main control system to achieve data exchange and task allocation
Execute preset programs or automated processes to ensure efficient operation of equipment
Main application areas:
1. Core control of wafer processing system
Control the precision action process of wafer transfer, alignment, lifting, rotation, etc
Manage the motion logic of various parts such as robot arms and slide tables
2. Vacuum chamber operation control
Control the operation status of vacuum pump, gas valve, and chamber heating module
Realize closed-loop regulation of vacuum pressure and safety interlock protection
3. Process management and sequential logic control
Execute complex processing steps such as etching, deposition, cleaning, and other multi-stage process controls
Support setting process interruption, automatic reset, fault response and other functions
4. Device communication and human-machine interface integration
Communicate with touch screen, upper computer, MES system to upload/download data
Support advanced operations such as remote monitoring, logging, parameter configuration, etc
Product details picture:

2L39-000009-21
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