TEL Tokyo Electron 2L39-00006-31 Temperature Controller
Brand:TEL Tokyo Electron
Model:2L39-000066-31
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details
TEL Tokyo Electron 2L39-00006-31 Temperature Controller
Product manual:
Product Name:
TEL Tokyo Electron 2L39-00006-31 Temperature Controller
(Temperature Controller)
Product Function Introduction:
This temperature controller is a key control unit in Tokyo Electron (TEL) semiconductor manufacturing equipment,
Used to achieve precise temperature regulation of key components or process chambers inside the equipment. The main functions include:
Collect signals from temperature sensors such as thermocouples and thermal resistance detectors (RTDs)
Accurate temperature regulation of heaters or cooling systems through PID control algorithm
Provide multiple temperature settings and automatic switching functions to meet complex process requirements
Equipped with over temperature alarm, abnormal protection, and fault diagnosis functions
Support communication interface with the main control system to achieve remote monitoring and parameter adjustment
Main application areas:
1. Temperature control of semiconductor process chamber
Accurately control the temperature environment inside the reaction chamber of CVD, PVD, etching and other equipment
Ensure temperature stability during the manufacturing process and improve product yield
2. Heating unit of wafer processing equipment
Manage the heating and temperature maintenance of wafer platforms, alignment stations, and carriers
Control the operation status of preheater and temperature balance device
3. Temperature management of vacuum system
Control the temperature of vacuum valve bodies, pipelines, or seals to prevent condensation or material deformation
Ensure the safety and stability of the system's operating environment
Product details picture:

2L39-000066-31
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