TEL Tokyo Electron 2L39-00006-31 Temperature Controller

Product manual:

Product Name:
TEL Tokyo Electron 2L39-00006-31 Temperature Controller
（Temperature Controller）

Product Function Introduction:
This temperature controller is a key control unit in Tokyo Electron (TEL) semiconductor manufacturing equipment,
Used to achieve precise temperature regulation of key components or process chambers inside the equipment. The main functions include:

Collect signals from temperature sensors such as thermocouples and thermal resistance detectors (RTDs)

Accurate temperature regulation of heaters or cooling systems through PID control algorithm

Provide multiple temperature settings and automatic switching functions to meet complex process requirements

Equipped with over temperature alarm, abnormal protection, and fault diagnosis functions

Support communication interface with the main control system to achieve remote monitoring and parameter adjustment

Main application areas:
1. Temperature control of semiconductor process chamber
Accurately control the temperature environment inside the reaction chamber of CVD, PVD, etching and other equipment

Ensure temperature stability during the manufacturing process and improve product yield

2. Heating unit of wafer processing equipment
Manage the heating and temperature maintenance of wafer platforms, alignment stations, and carriers

Control the operation status of preheater and temperature balance device

3. Temperature management of vacuum system
Control the temperature of vacuum valve bodies, pipelines, or seals to prevent condensation or material deformation

Ensure the safety and stability of the system's operating environment

Product details picture:

2L39-000066-31

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