TEL Tokyo Electron 2L80-000212-13 Driver

Product manual:

TEL Tokyo Electron 2L80-000212-13 Driver Module
Type: Driver Module/Actor Driver
Manufacturer: Tokyo Electron Ltd. (TEL)

1、 Product Function Overview
The 2L80-0000212-13 driver is a control module used for executing components in semiconductor equipment, such as motors, solenoid valves, linear actuators, etc. It mainly performs the following functions:

Receive control signals from the main control system or embedded processor

Amplify control signals to drive high-power loads (such as servo motors, stepper motors)

Provide precise speed control, position control, or torque control

Implement closed-loop feedback control and operate in conjunction with sensor modules

Equipped with electrical protection functions, such as overload, overvoltage, and overcurrent protection

2、 Typical application areas
1. Wafer Transfer Module
Drive vacuum manipulator, rotating arm, Z-axis lifting platform and other devices

Realize precise wafer handling, alignment, loading and unloading

2. Vacuum chamber action control system
Control the opening and closing actions of vacuum valves, positioning mechanisms, or drive motors for chamber doors

Support multi-point positioning and closed-loop feedback to enhance cavity safety and reliability

3. Valve controlled driving in chemical vapor deposition (CVD) or etching systems
Drive gas proportional control valve, solenoid valve or switching valve

Accurately adjust gas flow rate, ratio, and response timing

4. Cooling or heating platform drive device
Drive heat sink, cold plate adjustment components or fans/liquid cooling pumps

Maintain temperature uniformity and stability inside the cavity

3、 Technical characteristics (based on TEL common driver design speculation)
Supports analog input or digital control input (such as PWM, STEP/DIR, RS-485)

Integrated feedback control (compatible with encoders, Hall sensors, or current sensors)

Multi channel output capability, suitable for parallel multi axis control

Equipped with status indication and fault diagnosis functions

Industrial grade high reliability, suitable for TEL equipment with high cleanliness, high temperature, vacuum and other environments

Product details picture:

2L80-000212-13

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