TEL Tokyo Electron 2L80-000226-13 Drain Box

Product manual:

TEL Tokyo Electron 2L80-000226-13 Drain Box
It is a specialized component used in Tokyo Electron (TEL) semiconductor equipment to manage and discharge wastewater or condensate generated during the process.
This drain box is mainly used for collecting, draining, and safely discharging liquids inside the equipment, ensuring a clean and safe operating environment for the equipment.

1、 Basic Product Information
Model: 2L80-000226-13

Name: Drain Box/Water Drain Tray

Manufacturer: Tokyo Electron Ltd. (TEL)

Purpose: Collect and discharge wastewater generated by equipment processes or cooling processes

2、 Function and Function
wastewater collection

Collect condensed water, waste liquid or leaked liquid generated during the operation of the equipment to prevent liquid dispersion.

Liquid guidance and discharge

Safely discharge the collected liquid from the external drainage system of the equipment through pipelines or drainage interfaces.

Prevent water immersion inside the equipment

Protect electronic components and mechanical parts of equipment from liquid damage and extend equipment lifespan.

Easy to maintain

The design is easy to disassemble, making it convenient for regular cleaning and maintenance.

3、 Typical application areas
In semiconductor process equipment, especially wet bench cleaning and chemical liquid processing units

Collection of condensate water for equipment cooling system

Leakage monitoring area of reaction chamber and gas path system

Process tank body and auxiliary components of waste liquid recovery system

Product details picture:

2L80-000226-13

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