TEL Tokyo Electron 2L80-004910-31 Temperature Controller

Product manual:

TEL Tokyo Electron 2L80-004910-31 Temperature Controller
It is a high-precision temperature control module designed specifically for Tokyo Electronics (TEL) semiconductor manufacturing equipment,
Mainly used for real-time monitoring and closed-loop control of key temperature zones in the process,
Ensure temperature stability within the preset range to meet strict semiconductor process requirements.

1、 Product Overview
Project Content
Product Name: Temperature Controller
Product model 2L80-004910-31
Manufacturer Tokyo Electron Ltd
Application type: Precision temperature control module

2、 Core functions
Multi channel temperature monitoring

Real time reading of feedback signals from thermocouples, thermistors, or infrared sensors;

Support independent temperature measurement and control of multiple temperature zones, such as chamber walls, substrate platforms, gas pipelines, etc.

Closed loop temperature control regulation

Equipped with PID control algorithm, automatically adjust heating power or cooling airflow based on the deviation between the set value and the actual value;

It can achieve temperature control accuracy of ± 0.1 ° C or higher (depending on the application).

Alarm and linkage protection

Abnormal conditions such as overheating, open circuit, and short circuit can trigger an alarm and automatically disconnect the output;

Integrate with the main control system to ensure the safe operation of the equipment.

3、 Application scenarios
Temperature control of wafer heating table

Used for controlling heating platforms or baking stations in coating and developing equipment, cleaning machines, plasma etching machines, etc.

Vacuum chamber temperature regulation

Control the temperature of the chamber wall to prevent condensation or affect the stability of the vacuum process environment.

Gas path/chemical liquid temperature control

Maintain temperature stability of gases or chemical liquids during transportation to ensure process consistency.

Product details picture:

2L80-004910-31

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