TEL Tokyo Electron 2L81-000011-11 Interface Module

Brand:TEL Tokyo Electron
Model:2L81-000011-11
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 2L81-000011-11 Interface Module

Product manual:

Product model: TEL Tokyo Electron 2L81-000011-11
type: Interface Module
Application object: Control and Communication Interface Subsystem in Tokyo Electron Semiconductor Equipment System

1、 Product Function Description:
The 2L81-000011-11 interface module is an electronic interface module developed by Tokyo Electron specifically for its wafer processing and process equipment,
Mainly used for signal conversion between the main control system and various equipment subsystems
Communication relay and logic control, suitable for high-precision and high reliability industrial control scenarios.

2、 Main application areas:
Semiconductor manufacturing equipment control system

Installed in the core equipment of Tokyo Electron (such as CVD, Etcher, PVD, etc.),
Used for signal communication between the main control board and executing components (valves, motors, sensors).

I/O signal relay and transfer

Responsible for the unified access and forwarding of digital input/output (DI/DO), analog input/output (AI/AO) and other signals within the equipment, achieving a modular control architecture.

Communication management between devices

In a distributed system architecture, it is used for signal synchronization and data communication between different control subsystems,
The interface between the wafer processing unit and the vacuum control unit.

Motion Control and Position Feedback System

Suitable for control and signal feedback loops of motion units such as wafer transfer systems, alignment platforms, and robotic arms.

Interface of cleanroom automation equipment

An automated device that can be integrated into a clean environment to ensure accurate transmission of control signals under interference free and high stability conditions.

Equipment maintenance and status monitoring

Collect device operating parameters and diagnostic information through interface modules to achieve remote monitoring and maintenance functions.

3、 Typical applicable equipment examples:
TEL ALPHA series furnace tube equipment

TEL Trias/Celios/Certas series high-end craft platform