TEL Tokyo Electron 2L81-050032-14 Sensor Module

Product manual:

TEL Tokyo Electron 2L81-050032-14 Sensor Module
It is a detection and feedback unit specifically designed for semiconductor manufacturing equipment,
The main function is to collect various physical quantities of the device's operating status (such as temperature, pressure, position, gas concentration, etc.) and transmit the signals to the control system,
Ensure precise control and safe operation of the equipment process.

1、 Basic Product Information
Model: 2L81-050032-14

Name: Sensor Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Application category: Process parameter detection and signal acquisition module

2、 Core functions
Multi type sensor integration

Multiple sensors may be integrated, such as temperature sensors (thermocouples/RTDs), pressure sensors, gas sensors, position switches, etc.

Signal acquisition and conversion

Collect, process, and convert the analog or digital signals output by sensors into a signal format recognizable by the control system.

Real time monitoring and feedback

Real time monitoring of key process parameters, supporting automatic adjustment and alarm of equipment.

anti-interference design

Ensure the accuracy and stability of the signal, and reduce the impact of environmental noise.

3、 Typical application areas
Temperature and pressure monitoring

Monitor key parameters such as chamber temperature and gas pressure to ensure stable process conditions.

gas concentration detection

Collect changes in gas composition to assist in gas path control and safety protection.

Mechanical position detection

Provide feedback on the position and status of the executing mechanism to ensure accurate equipment operation.

Security and alarm system

Timely feedback when the sensor is abnormal, triggering safety shutdown or alarm measures.

Product details picture:

2L81-050032-14

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