TEL Tokyo Electron 2L81-050048-15 Digital Control Board

Product manual:

TEL Tokyo Electron 2L81-050048-15 Digital Control Board
It is a key control module in TEL semiconductor equipment, mainly responsible for digital signal processing and control execution,
Implement logical control and status management in the automated operation of equipment.

1、 Basic Information
Product Name: Digital Control Board

Model: 2L81-050048-15

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Digital Signal Processing and Control Module

Application field: Automation control system for semiconductor manufacturing equipment

2、 Main functions
Digital signal processing

Collect and process digital input signals from sensors, switches, and external devices.

Generate control signal output to drive actuators such as relays, solenoid valves, indicator lights, etc.

Logical control execution

Implement sequential logic control, interlocking protection, and alarm management during equipment operation.

Supports multiple signal inputs and outputs to meet the control requirements of complex process flows.

communication interface

Exchange data with the main control system (PLC, IPC, etc.) through a dedicated bus or interface.

Support real-time monitoring of device status and remote operation.

system integration

Modular design facilitates integration with other control modules to achieve overall system automation.

3、 Typical application areas
Etcher equipment
Control the gas flow switch, vacuum valve status, and plasma source start signal.

Thin film deposition equipment (CVD/ALD)
Monitor heating system, valve action, and control of reaction gas switching.

Wafer cleaning and coating development equipment (Wet Station/Track)
Implement pump control, liquid level detection, and process sequence logic control.

Handling and transportation system
Mechanical arm action instructions and safety interlock signal processing.

Product details picture:

2L81-050048-15

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