TEL Tokyo Electron 2L81-050211-17 Sensor Module

Brand:TEL Tokyo Electron
Model:2L81-050211-17
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
Please contact Yvonne for quotation, thank you!

Details

TEL Tokyo Electron 2L81-050211-17 Sensor Module

Product manual:

Product Name: 2L81-050211-17 Sensor Module
Manufacturer: Tokyo Electron Ltd
Product type: Sensor Module

1、 Product Overview
2L81-050211-17 is a sensor module used in Tokyo Electron (TEL) semiconductor manufacturing equipment,
It is a critical on-site detection and feedback component, usually used to collect operating parameters such as temperature, pressure, position, airflow, or vacuum degree,
Realize precise monitoring and feedback control of the manufacturing process.

2、 Main functions
Environmental or device status perception

Monitor physical quantities such as temperature, vacuum pressure, gas flow rate, liquid level, and action position inside the chamber.

Signal conversion output

Transmit the collected analog or digital signals to the upper control system or I/O board.

Linkage with control system

Support real-time feedback for process control, abnormal alarm, safety interlock and other functions.

3、 Applicable scenarios
This type of sensor module is widely used in the control units of the following TEL systems:

Etcher dry etching equipment

PVD/CVD Vacuum Thin Film Deposition System

Coater/Developer coating and developing equipment

Cleaning equipment, gas delivery, and vacuum systems

4、 Typical technical characteristics (inferred from common features of TEL sensor modules)
Project parameters/description
Power input 5V/12V/24V DC (depending on sensor type)
Signal type: Analog voltage/current signal, or digital signal (TTL/RS signal)
High precision detection with an error range typically within ± 0.5% to 1%
The output interfaces are mostly onboard sockets or standard cable connectors
Communication function: Some models may come with serial communication (such as I ² C, SPI, UART)
Suitable for clean rooms in the working environment, supporting corrosion-resistant and high-temperature resistant design