TEL Tokyo Electron 2L81-050213-16 Control Pulse Card

Product manual:

TEL Tokyo Electron 2L81-050213-16 Control Pulse Board/Pulse Control Module
It is a precision control module used in Tokyo Electron semiconductor equipment, mainly responsible for outputting pulse signals to the actuator,
Used to control servo drives, stepper motors, valve drivers, or other pulse input based devices.
This card is commonly used in high-precision positioning and timing control scenarios,
Etching in TEL CVD、 Plays a key control role in equipment such as EFEM and Coater/Developer.

1、 Basic Information
Product model: 2L81-050213-16

Product Name: Control Pulse Card/Pulse Output Board

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Pulse signal output control board

Installation method: Plug in installation in the control architecture, connected to the main control system (such as BX81/E244)

2、 Core functions
Pulse output control

Output pulse signals with set frequency, duty cycle, and period;

Used to drive stepper motors, pulse type actuators, grating alignment units, etc.

High precision timing control

Accurate control of pulse width and interval, achieving sub millisecond level control accuracy;

Multi channel output supports synchronous actions of multiple axes or units.

Responding to process logic signals

Send pulse commands such as start, stop, and speed control according to the program flow of the main control module;

Can be used in conjunction with limit detection and feedback signals to achieve closed-loop control (linked with other boards).

Signal isolation and protection

Channel isolation output to prevent signal crosstalk;

Equipped with overcurrent and short-circuit protection mechanisms.

Product details picture:

2L81-050213-16

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