TEL Tokyo Electron 2L87-132494-12 servo motor

Brand:TEL Tokyo Electron
Model:2L87-132494-12
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 2L87-132494-12 servo motor

Product manual:

1、 Basic Information
Product model: 2L87-132494-12

Product Name: Servo Motor

Manufacturer: Tokyo Electron Ltd. (TEL)

Product Category: Precision Motor Drive Components

Typical use: Used for automated systems such as wafer handling, positioning, and rotation in TEL semiconductor equipment

2、 Main functions
High precision position control
The servo motor works in conjunction with the encoder to achieve micrometer level position feedback and high-speed dynamic response,
Used for precise movement of robotic arms, platform slides, and loading platforms.

Closed loop servo feedback system
Equipped with absolute or incremental encoders, the motor status is fed back to the main controller in real-time,
Ensure closed-loop control and safety during the motion process.

High reliability and cleanroom adaptability
Adopting low dust materials and sealed structure, it meets the requirements of semiconductor clean environment level and supports 24-hour continuous operation.

3、 Typical application scenarios
Load Port: Control the robotic arm or lifting device to achieve precise placement of wafers.

Coater/Developer: Used for rotating platforms or process chamber positioning mechanisms.

Etching or CVD equipment: Drive gas valve control system or sample injection/extraction moving device.

Automatic alignment system: realizes high-speed alignment, lifting, offset correction and other action control.

4、 Product features (based on TEL servo motor universal design)
Industrial grade servo control with short response time and good dynamic characteristics

Multiple flange sizes and shaft diameter specifications for easy adaptation to different mechanisms

Used in conjunction with TEL dedicated servo drives or I/O control boards

Wide working temperature range and high stability

Possible built-in brake mechanism, supporting safe shutdown or power-off to maintain position