TEL Tokyo Electron 308-600223-4 Control Motherboard Card

Product manual:

TEL Tokyo Electron 308-600223-4 Main Control Board/Controller Card
It is a core control unit used in semiconductor manufacturing equipment,
Usually deployed within the main control system of Tokyo Electron (TEL) devices, it serves as one of the instruction processing centers for system operation.
It is responsible for coordinating signal input and output, executing logical control processes, and performing high-speed communication with the upper management system and other functional modules.

1、 Basic Information
Product model: 308-600223-4

Product Name: Control Main Board/Controller PCB

Manufacturer: Tokyo Electron Ltd. (TEL)

Equipment platform: TEL Etch/CVD/Coater/Developer/EFEM series

Module Type: Embedded Control Processing Board

2、 Main functions
Process control

Execute the automatic control logic program of the device;

Manage the operational sequence of process subsystems such as chambers, temperature control, valves, and power supply.

Data Processing and Communication

Receive and process real-time data from I/O boards and sensors;

High speed communication with TEL system backbone control network or upper MES/HMI.

Linkage and safety control

Implement equipment safety interlock control (such as door opening protection, vacuum interlock, etc.);

Provide fault alarm and status feedback mechanism.

Coordination and management between modules

Coordinate the synchronous operation of multiple functional modules such as servo control board, power distribution board, and interface module;

Route and output control signals to downstream execution units.

Product details picture:

308-600223-4

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