TEL Tokyo Electron 3208-000036-13 Printed Circuit Board

Product manual:

1、 Basic Information
Product Model: 3208-000036-13

Product Name: Printed Circuit Board (PCB)

Manufacturer: Tokyo Electron Limited (TEL)

Board type: Control/Interface purpose PCB

Version number: -13 (indicating the 13th revision of this circuit board, which may correspond to different device versions or feature enhancements)

2、 Main functions (inferred based on TEL numbering structure and usage conventions)
This PCB is a control or interface circuit board in TEL semiconductor equipment, mainly used for:

Function type description
Signal transmission enables the connection and conversion of digital/analog signals between various subsystems or modules
Function expansion provides external device interface support for the main control system (such as I/O expansion, communication relay, etc.)
Equipment control includes logic circuits or microcontrollers used to control actuators or process sensor signals
The power allocation board integrates auxiliary functions such as power stabilization and voltage conversion

3、 Typical application areas
This PCB model may be used in the following devices or subsystems (depending on the device configuration):

Lithography machine auxiliary system (such as ACT series)

Control the actions or feedback of spray nozzles, cooling platforms, heating elements, etc

Etching and thin film deposition systems (such as Tactras, Trias series)

Manage the electrical control signals of subsystems such as gas valves, vacuum pumps, and heating chambers

Transport/Vacuum Transfer Module

Control components such as vacuum doors, turntables, electromagnetic locks, position sensors, etc

4、 Technical features
Industrial grade multi-layer PCB, suitable for clean rooms and high stability operation requirements

Highly integrated component layout, suitable for compact spaces

The board may have components such as status indicator lights, signal interfaces, logic chips, etc

Version "-13" indicates that this board has been optimized and upgraded based on previous versions to improve compatibility or performance

Product details picture:

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