TEL Tokyo Electron 3208-000171-13 Controller Module

Brand:TEL Tokyo Electron
Model:3208-000171-13
Product status: New/used
Shipping place: Xiamen, China
Warranty: 365 days
Structural form: Other (specific form may vary depending on application)
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Details

TEL Tokyo Electron 3208-000171-13 Controller Module

Product manual:

TEL Tokyo Electron 3208-000171-13 Controller Module
It is an embedded control core component specifically designed for Tokyo Electronics (TEL) semiconductor manufacturing equipment,
Mainly used for managing and coordinating the operational logic of various subsystems in the equipment,
Executing key functions such as process control, data acquisition and processing, and communication scheduling is one of the brains of the entire equipment.

1、 Product Overview
Project Content
Product Name Controller Module
Product model 3208-000171-13
Manufacturer Tokyo Electron Ltd
Function type: Central logic control and task scheduling

2、 Core functions
Main control logic processing

Embedded industrial grade CPU or FPGA control unit, responsible for running the main control program of the equipment;

Manage system tasks such as temperature control, pressure regulation, sensor acquisition, and action logic.

Data collection and communication interface

Multi channel signal interaction with analog input modules, digital output modules, IO boards, PLC subsystems, etc;

Supports internal communication protocols and external interfaces of TEL devices (which may include RS-232/485, Ethernet, CAN, etc.).

Process management

Execute the preset process sequence to ensure precise connection of equipment actions in each stage;

Support parameterized settings, automated control, anomaly detection, and alarm response.

3、 Typical application areas
Coater/Developer

Control the rotation speed of the glue coating, the movement of the arm mechanism, the transportation of the developer solution, heating/cooling, and other actions.

Etching and deposition equipment (Etcher/CVD/ALD)

Manage the linkage logic between gas processes, plasma power, temperature control systems, and vacuum chambers.

Wafer handling system

Coordinate the actions of vacuum chamber doors, robotic arms, lifting platforms, etc., to achieve precise transfer of wafers from one process unit to the next.