TEL Tokyo Electron 3281-000019-15 Sensor Component

Product manual:

1、 Product functional positioning
3281-000019-15 Sensor Component
It is a key detection module used in Tokyo Electron (TEL) semiconductor equipment for real-time monitoring of equipment status or process parameters.
Such components are typically composed of high-precision sensors, circuit boards, casings, and communication interfaces,
Used to collect specific physical quantities within the environment or equipment, providing feedback data for the control system,
Implement closed-loop control and abnormal warning.

2、 Main application areas
1. Real time monitoring of key process parameters
Typical monitoring objects (inferred based on component numbers):

Temperature (thermocouple or RTD)

Pressure (vacuum chamber, gas path)

Displacement/position (robotic arm, lifting device)

Gas flow or atmosphere detection (MFC bypass or transmission path)

Equipment type:

Thin film deposition equipment (CVD, ALD, PVD)

Wafer cleaning equipment, developing system

Etcher equipment

Wafer handling system Transfer Modules

2. Process control closed-loop feedback unit
Functional features:

Transmit the collected signals to the controller module (such as the 3M81 series control board) through analog or digital means;

Form a closed-loop system with executing agencies (such as solenoid valves, heaters, motors, etc.) to achieve precise control;

It can be linked with alarm and protection mechanisms to quickly respond to shutdown or power cut off in abnormal states.

3. Equipment stability and yield guarantee mechanism
High precision measurement: high-resolution detection of key parameters such as temperature and air pressure, which directly affects process stability;
Predict maintenance cycles (such as vibration or temperature drift trend analysis).

Product details picture:

3281-000019-15

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