TEL Tokyo Electron 3281-000034-15 Semiconductor Module

Product manual:

TEL Tokyo Electron 3281-000034-15 Semiconductor Module
It is a specialized functional module used in semiconductor manufacturing equipment, belonging to TEL Tokyo Electron's customized hardware,
Widely deployed in its etching CVD、 In process equipment such as cleaning and conveying

1、 Basic Information
Product model: 3281-000034-15

Product Name: Semiconductor Equipment Dedicated Module

Manufacturer: Tokyo Electron Ltd. (TEL)

Module type: Control/Communication/Logic Processing Unit (based on TEL device module system)

2、 Core functions (inferred based on numbering structure and TEL module characteristics)
Signal Relay and Interface Management

Realize electrical signal bridging between multiple subsystems within the device;

Provide functions such as signal buffering, conversion, and level adaptation to ensure reliable and stable system communication.

Communication and bus interface processing

Support TEL internal control bus, I/O interface bus, or external communication protocols (such as RS-232, TTL, CAN, etc.);

Used for command and status transmission between the main control board (such as E244 series) and slave devices.

Status monitoring and logic execution

Integrated control logic devices (such as FPGA, logic gate array) are used to process input signals and drive control logic;

It may have functions such as status lights, error detection, and equipment interlocking.

Modular connection

Can be inserted into TEL system control rack or backplane;

Paired with E249, BX81, 1B80 and other series modules, it forms a complete process control chain.

3、 Application Fields
This module is commonly used for the following types of TEL semiconductor equipment:

Etch Systems etching equipment

Control signals between subsystems such as RF matching, electrode status monitoring, and chamber gas distribution;

Chemical Vapor Deposition Equipment (CVD/ALD)

Manage multi system linkage signals such as chamber environment, temperature control, gas path control, pressure monitoring, etc;

Wafer processing systems (such as Lithium series)

Realize signal coordination for control equipment such as conveyor belts, lifting platforms, positioning systems, sensors, etc;

Cleaning and Load System (Wet Bench/EFEM)

Control the mechanical action of the wafer, fixture detection, safety interlock feedback and other process signal processing.

Product details picture:

3281-000034-15

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