TEL Tokyo Electron 3281-000080-13 Input/Output Board

Product manual:

TEL Tokyo Electron 3281-000080-13 Input/Output Board
Manufacturer: Tokyo Electron Ltd. (TEL)
Component type: Input/Output Board

1、 Function Overview
This I/O board is a common control interface component in TEL semiconductor equipment, and its main functions include:

Implement input and output processing of digital and/or analog signals in equipment control systems

As a signal relay bridge connecting the main control unit with various sensors and actuators

Provide key functions such as signal isolation, level matching, and status indication

Support tasks such as interlocking logic, alarm triggering, and control execution

2、 Typical application areas
This board is typically used in the following subsystems of TEL equipment:

1. Gas/liquid control system
Input: Collect signals from gas flow meters, pressure sensors, and liquid level sensors

Output: Drive electromagnetic valves, pumps, electric heating units and other equipment

2. Vacuum chamber/Loadlock system
Processing signals from vacuum pressure switches, door switches, and chamber temperature control components

Manage gas control components and safety interlock mechanisms inside the chamber

3. Wafer Transfer Module
Connect signals from robotic arm position sensors, limit switches, encoders, etc

Control the lifting device, rotating platform, handling drive motor and other components

4. Cleaning/drying/auxiliary modules
Control auxiliary process equipment such as liquid spray, fan, and drying electric heater

Real time collection of status feedback for process status confirmation

3、 Technical characteristics (speculation)
Function module description
Digital input (DI) is used to detect status switches, sensor outputs, etc
Output Function Digital Output (DO) is used to control actuators, relays, solenoid valves, etc
Signal protection supports optocoupler isolation and overvoltage/overcurrent protection design
The status display may have LED status indicators for on-site diagnosis
Structural design of industrial grade multi-layer PCB, strong anti-interference ability, suitable for clean environments

Product details picture:

3281-000080-13

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