TEL Tokyo Electron 3281-0001110-13 Lighting Control Board

Product manual:

TEL Tokyo Electron 3281-0001110-13 Lighting Control Board
Lighting Control Board is an electronic control component specifically designed for semiconductor manufacturing equipment,
The main function is to perform precise control, dimming management, and status feedback on the lighting system,
Widely used in applications such as detection lighting, alignment light sources, and internal observation lights in wafer processing equipment.

1、 Basic Product Information
Project Content
Product model 3281-000110-13
Product Name: Lighting Control Board
Manufacturer Tokyo Electron Ltd. (TEL)
Function type: Light source power control/dimming driver module

2、 Main functions
Functional category description
Lighting power control controls the switching, voltage stabilization, and timed operation of lighting fixtures.
Brightness adjustment achieves precise adjustment of lighting brightness (PWM or DAC mode) to meet different detection needs.
Status feedback provides lighting status signals (on/off/fault) back to the main control system.
Overload protection provides automatic protection for situations such as overcurrent and overheating of the light source.

3、 Typical application areas
The lighting control board 3281-000110-13 is mainly used in the following TEL equipment systems:

1. Wafer Alignment and Inspection System
Control the detection lighting before and after development;

To provide a stable illumination source for aligning the camera.

2. Inside the wafer handling chamber
Provide an observation light source inside the vacuum or wafer cavity;

Startup/shutdown is remotely controlled by the operating system.

3. Lighting control of lithography and development equipment
Control the auxiliary lights in the lithography area;

Auxiliary personnel observe during equipment maintenance.

4. Equipment panel and status indicator lights
It is also possible to control the working status indicator lighting (red, green, yellow lights, alarm lights) on the device panel.

Product details picture:

3281-000110-13

More related products:

GE 336A4940CSP16 Interface module

LenzeMDFKARS080-22servomotor

PM645B processor module

More product recommendations:

AMAT 0190-11415 Digital Input Module

GE D20 EME 10BASE-T Digital Control Modu

RADISYS 451558-004 Communication Module